Journal Title:Journal Of Vacuum Science & Technology B
Journal of Vacuum Science & Technology B emphasizes processing, measurement and phenomena associated with micrometer and nanometer structures and devices. Processing may include vacuum processing, plasma processing and microlithography among others, while measurement refers to a wide range of materials and device characterization methods for understanding the physics and chemistry of submicron and nanometer structures and devices.
Journal of Vacuum Science & Technology B 强调与微米和纳米结构和器件相关的加工、测量和现象。处理可能包括真空处理、等离子体处理和微光刻等,而测量是指广泛的材料和器件表征方法,用于了解亚微米和纳米结构和器件的物理和化学。
大类学科 | 小类学科 | 分区 | Top期刊 | 综述期刊 |
工程技术 | ENGINEERING, ELECTRICAL & ELECTRONIC 工程:电子与电气 NANOSCIENCE & NANOTECHNOLOGY 纳米科技 PHYSICS, APPLIED 物理:应用 | 4区 | 是 | 是 |
大类学科 | 小类学科 | 分区 |
工程技术 | ENGINEERING, ELECTRICAL & ELECTRONIC 工程:电子与电气 NANOSCIENCE & NANOTECHNOLOGY 纳米科技 PHYSICS, APPLIED 物理:应用 | 4区 |
期刊名称 | 领域 | 中科院分区 | 影响因子 |
Applicable Algebra In Engineering Communication And Computing | 工程技术 | 4区 | 0.700 |
Revista Romana De Materiale-romanian Journal Of Materials | 工程技术 | 4区 | 0.700 |
Lasers In Engineering | 工程技术 | 4区 | 0.500 |
Science And Technology For The Built Environment | 工程技术 | 4区 | 1.900 |
Numerical Heat Transfer Part B-fundamentals | 工程技术 | 4区 | 1.000 |
Numerical Heat Transfer Part B-fundamentals | 工程技术 | 4区 | 1.000 |